JPH0320438U - - Google Patents
Info
- Publication number
- JPH0320438U JPH0320438U JP7993389U JP7993389U JPH0320438U JP H0320438 U JPH0320438 U JP H0320438U JP 7993389 U JP7993389 U JP 7993389U JP 7993389 U JP7993389 U JP 7993389U JP H0320438 U JPH0320438 U JP H0320438U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- tweezers
- release
- contact parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7993389U JPH0320438U (en]) | 1989-07-06 | 1989-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7993389U JPH0320438U (en]) | 1989-07-06 | 1989-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320438U true JPH0320438U (en]) | 1991-02-28 |
Family
ID=31624543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7993389U Pending JPH0320438U (en]) | 1989-07-06 | 1989-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320438U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001233451A (ja) * | 2000-02-23 | 2001-08-28 | Dainippon Printing Co Ltd | 基板搬送装置 |
-
1989
- 1989-07-06 JP JP7993389U patent/JPH0320438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001233451A (ja) * | 2000-02-23 | 2001-08-28 | Dainippon Printing Co Ltd | 基板搬送装置 |